8/4/2010	9:37:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/4/2010	9:37:18 AM	Recipe started at 9:37 AM
8/4/2010	9:37:18 AM	H2 valve closed
8/4/2010	9:37:18 AM	BCl3 valve closed
8/4/2010	9:37:18 AM	PH3 valve closed
8/4/2010	9:37:18 AM	SiCl4 pre valve closed
8/4/2010	9:37:18 AM	SiCl4 post valve closed
8/4/2010	9:37:18 AM	Main Vac valve closed
8/4/2010	9:37:18 AM	Bypass valve closed
8/4/2010	9:37:18 AM	Bubbler valve closed
8/4/2010	9:37:18 AM	Helium valve opened
8/4/2010	9:37:18 AM	Helium MFC set to  500.000000
8/4/2010	9:37:18 AM	H2 MFC set to  0.000000
8/4/2010	9:37:18 AM	BCl3 MFC set to  0.000000
8/4/2010	9:37:18 AM	PHl3 MFC set to  0.000000
8/4/2010	9:37:18 AM	SiCl4 MFC set to  0.000000
8/4/2010	9:37:18 AM	Bypass solenoid MFC set to  0.000000
8/4/2010	9:37:19 AM	Tube furnace set to 0
8/4/2010	9:38:38 AM	Helium valve closed
8/4/2010	9:38:38 AM	H2 valve closed
8/4/2010	9:38:38 AM	BCl3 valve closed
8/4/2010	9:38:38 AM	PH3 valve closed
8/4/2010	9:38:38 AM	SiCl4 pre valve closed
8/4/2010	9:38:38 AM	SiCl4 post valve closed
8/4/2010	9:38:38 AM	Main Vac valve closed
8/4/2010	9:38:38 AM	Bypass valve closed
8/4/2010	9:38:38 AM	Bubbler valve closed
8/4/2010	9:38:38 AM	Helium MFC set to  0.000000
8/4/2010	9:38:38 AM	H2 MFC set to  0.000000
8/4/2010	9:38:38 AM	BCl3 MFC set to  0.000000
8/4/2010	9:38:38 AM	PHl3 MFC set to  0.000000
8/4/2010	9:38:38 AM	SiCl4 MFC set to  0.000000
8/4/2010	9:38:38 AM	Bypass solenoid MFC set to  0.000000
8/4/2010	9:38:39 AM	Tube furnace set to 0
8/4/2010	9:38:39 AM	Run finished at 9:38 AM
8/4/2010	9:38:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/4/2010	9:40:07 AM	Program exited cleanly
8/4/2010	9:52:40 AM	Program started normally
8/4/2010	9:52:40 AM	Helium valve closed
8/4/2010	9:52:40 AM	H2 valve closed
8/4/2010	9:52:40 AM	BCl3 valve closed
8/4/2010	9:52:40 AM	PH3 valve closed
8/4/2010	9:52:40 AM	SiCl4 pre valve closed
8/4/2010	9:52:40 AM	SiCl4 post valve closed
8/4/2010	9:52:40 AM	Main Vac valve closed
8/4/2010	9:52:40 AM	Bypass valve closed
8/4/2010	9:52:40 AM	Bubbler valve closed
8/4/2010	9:52:41 AM	Helium MFC set to  0.000000
8/4/2010	9:52:41 AM	H2 MFC set to  0.000000
8/4/2010	9:52:41 AM	BCl3 MFC set to  0.000000
8/4/2010	9:52:41 AM	PHl3 MFC set to  0.000000
8/4/2010	9:52:41 AM	SiCl4 MFC set to  0.000000
8/4/2010	9:52:41 AM	Bypass solenoid MFC set to  760.000000
8/4/2010	9:52:41 AM	Tube furnace set to 0
8/4/2010	9:52:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/4/2010	9:52:42 AM	Recipe started at 9:52 AM
8/4/2010	9:52:42 AM	Helium valve closed
8/4/2010	9:52:42 AM	H2 valve closed
8/4/2010	9:52:42 AM	BCl3 valve closed
8/4/2010	9:52:42 AM	PH3 valve closed
8/4/2010	9:52:42 AM	SiCl4 pre valve closed
8/4/2010	9:52:42 AM	SiCl4 post valve closed
8/4/2010	9:52:42 AM	Main Vac valve closed
8/4/2010	9:52:42 AM	Bubbler valve closed
8/4/2010	9:52:42 AM	Bypass valve opened
8/4/2010	9:52:42 AM	Helium MFC set to  0.000000
8/4/2010	9:52:42 AM	H2 MFC set to  0.000000
8/4/2010	9:52:42 AM	BCl3 MFC set to  0.000000
8/4/2010	9:52:42 AM	PHl3 MFC set to  0.000000
8/4/2010	9:52:42 AM	SiCl4 MFC set to  0.000000
8/4/2010	9:52:42 AM	Bypass solenoid MFC set to  0.000000
8/4/2010	9:52:43 AM	Tube furnace set to 0
8/4/2010	9:53:21 AM	Helium valve closed
8/4/2010	9:53:21 AM	H2 valve closed
8/4/2010	9:53:21 AM	BCl3 valve closed
8/4/2010	9:53:21 AM	PH3 valve closed
8/4/2010	9:53:21 AM	SiCl4 pre valve closed
8/4/2010	9:53:21 AM	SiCl4 post valve closed
8/4/2010	9:53:21 AM	Bubbler valve closed
8/4/2010	9:53:21 AM	Main Vac valve opened
8/4/2010	9:53:21 AM	Bypass valve opened
8/4/2010	9:53:21 AM	Helium MFC set to  0.000000
8/4/2010	9:53:21 AM	H2 MFC set to  0.000000
8/4/2010	9:53:21 AM	BCl3 MFC set to  0.000000
8/4/2010	9:53:21 AM	PHl3 MFC set to  0.000000
8/4/2010	9:53:21 AM	SiCl4 MFC set to  0.000000
8/4/2010	9:53:21 AM	Bypass solenoid MFC set to  0.000000
8/4/2010	9:53:21 AM	Tube furnace set to 0
8/4/2010	9:53:22 AM	Run finished at 9:53 AM
8/4/2010	9:53:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/4/2010	11:18:19 AM	Helium valve opened
8/4/2010	11:18:22 AM	Helium MFC set to  100.000000
8/4/2010	11:18:25 AM	Tube furnace set to 100
8/4/2010	11:30:18 AM	Helium valve closed
8/4/2010	11:31:31 AM	Bypass valve closed
8/4/2010	11:31:31 AM	Main Vac valve closed
8/4/2010	11:31:37 AM	Main Vac valve opened
8/4/2010	11:31:45 AM	Bypass valve opened
8/4/2010	11:31:46 AM	Helium valve opened
8/4/2010	11:32:15 AM	Helium valve closed
8/4/2010	11:32:51 AM	Recipe started at 11:32 AM
8/4/2010	11:32:51 AM	Helium valve closed
8/4/2010	11:32:51 AM	BCl3 valve closed
8/4/2010	11:32:51 AM	PH3 valve closed
8/4/2010	11:32:51 AM	SiCl4 pre valve closed
8/4/2010	11:32:51 AM	SiCl4 post valve closed
8/4/2010	11:32:51 AM	Main Vac valve closed
8/4/2010	11:32:51 AM	Bypass valve closed
8/4/2010	11:32:51 AM	Bubbler valve closed
8/4/2010	11:32:51 AM	H2 valve opened
8/4/2010	11:32:51 AM	Helium MFC set to  0.000000
8/4/2010	11:32:51 AM	H2 MFC set to  500.000000
8/4/2010	11:32:51 AM	BCl3 MFC set to  0.000000
8/4/2010	11:32:51 AM	PHl3 MFC set to  0.000000
8/4/2010	11:32:51 AM	SiCl4 MFC set to  0.000000
8/4/2010	11:32:51 AM	Bypass solenoid MFC set to  0.000000
8/4/2010	11:32:51 AM	Tube furnace set to 100
8/4/2010	11:34:11 AM	Helium valve closed
8/4/2010	11:34:11 AM	BCl3 valve closed
8/4/2010	11:34:11 AM	PH3 valve closed
8/4/2010	11:34:11 AM	SiCl4 pre valve closed
8/4/2010	11:34:11 AM	SiCl4 post valve closed
8/4/2010	11:34:11 AM	Main Vac valve closed
8/4/2010	11:34:11 AM	Bypass valve closed
8/4/2010	11:34:11 AM	H2 valve opened
8/4/2010	11:34:11 AM	Bubbler valve opened
8/4/2010	11:34:11 AM	Helium MFC set to  0.000000
8/4/2010	11:34:11 AM	H2 MFC set to  500.000000
8/4/2010	11:34:11 AM	BCl3 MFC set to  0.000000
8/4/2010	11:34:11 AM	PHl3 MFC set to  0.000000
8/4/2010	11:34:11 AM	SiCl4 MFC set to  0.000000
8/4/2010	11:34:11 AM	Bypass solenoid MFC set to  0.000000
8/4/2010	11:34:11 AM	Tube furnace set to 1000
8/4/2010	11:54:11 AM	Helium valve closed
8/4/2010	11:54:11 AM	PH3 valve closed
8/4/2010	11:54:11 AM	Main Vac valve closed
8/4/2010	11:54:11 AM	Bypass valve closed
8/4/2010	11:54:11 AM	H2 valve opened
8/4/2010	11:54:11 AM	BCl3 valve opened
8/4/2010	11:54:11 AM	SiCl4 pre valve opened
8/4/2010	11:54:11 AM	SiCl4 post valve opened
8/4/2010	11:54:11 AM	Bubbler valve opened
8/4/2010	11:54:11 AM	Helium MFC set to  0.000000
8/4/2010	11:54:11 AM	H2 MFC set to  500.000000
8/4/2010	11:54:11 AM	BCl3 MFC set to  29.000000
8/4/2010	11:54:11 AM	PHl3 MFC set to  0.000000
8/4/2010	11:54:11 AM	SiCl4 MFC set to  50.000000
8/4/2010	11:54:11 AM	Bypass solenoid MFC set to  0.000000
8/4/2010	11:54:11 AM	Tube furnace set to 1000
8/4/2010	12:04:11 PM	H2 valve closed
8/4/2010	12:04:11 PM	BCl3 valve closed
8/4/2010	12:04:11 PM	PH3 valve closed
8/4/2010	12:04:11 PM	SiCl4 pre valve closed
8/4/2010	12:04:11 PM	SiCl4 post valve closed
8/4/2010	12:04:11 PM	Main Vac valve closed
8/4/2010	12:04:11 PM	Bypass valve closed
8/4/2010	12:04:11 PM	Helium valve opened
8/4/2010	12:04:11 PM	Bubbler valve opened
8/4/2010	12:04:11 PM	Helium MFC set to  500.000000
8/4/2010	12:04:11 PM	H2 MFC set to  0.000000
8/4/2010	12:04:11 PM	BCl3 MFC set to  0.000000
8/4/2010	12:04:11 PM	PHl3 MFC set to  0.000000
8/4/2010	12:04:11 PM	SiCl4 MFC set to  0.000000
8/4/2010	12:04:11 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	12:04:11 PM	Tube furnace set to 0
8/4/2010	12:24:11 PM	Helium valve closed
8/4/2010	12:24:11 PM	H2 valve closed
8/4/2010	12:24:11 PM	BCl3 valve closed
8/4/2010	12:24:11 PM	PH3 valve closed
8/4/2010	12:24:11 PM	SiCl4 pre valve closed
8/4/2010	12:24:11 PM	SiCl4 post valve closed
8/4/2010	12:24:11 PM	Main Vac valve closed
8/4/2010	12:24:11 PM	Bypass valve closed
8/4/2010	12:24:11 PM	Bubbler valve closed
8/4/2010	12:24:11 PM	Helium MFC set to  0.000000
8/4/2010	12:24:11 PM	H2 MFC set to  0.000000
8/4/2010	12:24:11 PM	BCl3 MFC set to  0.000000
8/4/2010	12:24:11 PM	PHl3 MFC set to  0.000000
8/4/2010	12:24:11 PM	SiCl4 MFC set to  0.000000
8/4/2010	12:24:11 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	12:24:11 PM	Tube furnace set to 0
8/4/2010	12:24:12 PM	Run finished at 12:24 PM
8/4/2010	12:33:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/4/2010	12:33:03 PM	Recipe started at 12:33 PM
8/4/2010	12:33:03 PM	Helium valve closed
8/4/2010	12:33:03 PM	H2 valve closed
8/4/2010	12:33:03 PM	BCl3 valve closed
8/4/2010	12:33:03 PM	PH3 valve closed
8/4/2010	12:33:03 PM	SiCl4 pre valve closed
8/4/2010	12:33:03 PM	SiCl4 post valve closed
8/4/2010	12:33:03 PM	Main Vac valve closed
8/4/2010	12:33:03 PM	Bubbler valve closed
8/4/2010	12:33:03 PM	Bypass valve opened
8/4/2010	12:33:03 PM	Helium MFC set to  0.000000
8/4/2010	12:33:03 PM	H2 MFC set to  0.000000
8/4/2010	12:33:03 PM	BCl3 MFC set to  0.000000
8/4/2010	12:33:03 PM	PHl3 MFC set to  0.000000
8/4/2010	12:33:03 PM	SiCl4 MFC set to  0.000000
8/4/2010	12:33:03 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	12:33:04 PM	Tube furnace set to 0
8/4/2010	12:33:41 PM	Helium valve closed
8/4/2010	12:33:41 PM	H2 valve closed
8/4/2010	12:33:41 PM	BCl3 valve closed
8/4/2010	12:33:41 PM	PH3 valve closed
8/4/2010	12:33:41 PM	SiCl4 pre valve closed
8/4/2010	12:33:41 PM	SiCl4 post valve closed
8/4/2010	12:33:41 PM	Bubbler valve closed
8/4/2010	12:33:41 PM	Main Vac valve opened
8/4/2010	12:33:41 PM	Bypass valve opened
8/4/2010	12:33:41 PM	Helium MFC set to  0.000000
8/4/2010	12:33:41 PM	H2 MFC set to  0.000000
8/4/2010	12:33:41 PM	BCl3 MFC set to  0.000000
8/4/2010	12:33:41 PM	PHl3 MFC set to  0.000000
8/4/2010	12:33:41 PM	SiCl4 MFC set to  0.000000
8/4/2010	12:33:41 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	12:33:41 PM	Tube furnace set to 0
8/4/2010	12:33:42 PM	Run finished at 12:33 PM
8/4/2010	12:33:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/4/2010	1:01:51 PM	Helium MFC set to  100.000000
8/4/2010	1:01:52 PM	Helium valve opened
8/4/2010	1:14:35 PM	Helium valve closed
8/4/2010	1:19:17 PM	Helium valve opened
8/4/2010	1:48:56 PM	Helium valve closed
8/4/2010	1:49:00 PM	Helium MFC set to  0.000000
8/4/2010	2:14:59 PM	Recipe started at 2:14 PM
8/4/2010	2:14:59 PM	Helium valve closed
8/4/2010	2:14:59 PM	BCl3 valve closed
8/4/2010	2:14:59 PM	PH3 valve closed
8/4/2010	2:14:59 PM	SiCl4 pre valve closed
8/4/2010	2:14:59 PM	SiCl4 post valve closed
8/4/2010	2:14:59 PM	Main Vac valve closed
8/4/2010	2:14:59 PM	Bypass valve closed
8/4/2010	2:14:59 PM	Bubbler valve closed
8/4/2010	2:14:59 PM	H2 valve opened
8/4/2010	2:14:59 PM	Helium MFC set to  0.000000
8/4/2010	2:14:59 PM	H2 MFC set to  500.000000
8/4/2010	2:14:59 PM	BCl3 MFC set to  0.000000
8/4/2010	2:14:59 PM	PHl3 MFC set to  0.000000
8/4/2010	2:14:59 PM	SiCl4 MFC set to  0.000000
8/4/2010	2:14:59 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	2:14:59 PM	Tube furnace set to 100
8/4/2010	2:16:19 PM	Helium valve closed
8/4/2010	2:16:19 PM	BCl3 valve closed
8/4/2010	2:16:19 PM	PH3 valve closed
8/4/2010	2:16:19 PM	SiCl4 pre valve closed
8/4/2010	2:16:19 PM	SiCl4 post valve closed
8/4/2010	2:16:19 PM	Main Vac valve closed
8/4/2010	2:16:19 PM	Bypass valve closed
8/4/2010	2:16:19 PM	H2 valve opened
8/4/2010	2:16:19 PM	Bubbler valve opened
8/4/2010	2:16:19 PM	Helium MFC set to  0.000000
8/4/2010	2:16:19 PM	H2 MFC set to  500.000000
8/4/2010	2:16:19 PM	BCl3 MFC set to  0.000000
8/4/2010	2:16:19 PM	PHl3 MFC set to  0.000000
8/4/2010	2:16:19 PM	SiCl4 MFC set to  0.000000
8/4/2010	2:16:19 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	2:16:19 PM	Tube furnace set to 1000
8/4/2010	2:36:19 PM	Helium valve closed
8/4/2010	2:36:19 PM	PH3 valve closed
8/4/2010	2:36:19 PM	Main Vac valve closed
8/4/2010	2:36:19 PM	Bypass valve closed
8/4/2010	2:36:19 PM	H2 valve opened
8/4/2010	2:36:19 PM	BCl3 valve opened
8/4/2010	2:36:19 PM	SiCl4 pre valve opened
8/4/2010	2:36:19 PM	SiCl4 post valve opened
8/4/2010	2:36:19 PM	Bubbler valve opened
8/4/2010	2:36:19 PM	Helium MFC set to  0.000000
8/4/2010	2:36:19 PM	H2 MFC set to  500.000000
8/4/2010	2:36:19 PM	BCl3 MFC set to  29.000000
8/4/2010	2:36:19 PM	PHl3 MFC set to  0.000000
8/4/2010	2:36:19 PM	SiCl4 MFC set to  50.000000
8/4/2010	2:36:19 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	2:36:19 PM	Tube furnace set to 1000
8/4/2010	2:46:19 PM	H2 valve closed
8/4/2010	2:46:19 PM	BCl3 valve closed
8/4/2010	2:46:19 PM	PH3 valve closed
8/4/2010	2:46:19 PM	SiCl4 pre valve closed
8/4/2010	2:46:19 PM	SiCl4 post valve closed
8/4/2010	2:46:19 PM	Main Vac valve closed
8/4/2010	2:46:19 PM	Bypass valve closed
8/4/2010	2:46:19 PM	Helium valve opened
8/4/2010	2:46:19 PM	Bubbler valve opened
8/4/2010	2:46:19 PM	Helium MFC set to  500.000000
8/4/2010	2:46:19 PM	H2 MFC set to  0.000000
8/4/2010	2:46:19 PM	BCl3 MFC set to  0.000000
8/4/2010	2:46:19 PM	PHl3 MFC set to  0.000000
8/4/2010	2:46:19 PM	SiCl4 MFC set to  0.000000
8/4/2010	2:46:19 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	2:46:19 PM	Tube furnace set to 0
8/4/2010	3:06:19 PM	Helium valve closed
8/4/2010	3:06:19 PM	H2 valve closed
8/4/2010	3:06:19 PM	BCl3 valve closed
8/4/2010	3:06:19 PM	PH3 valve closed
8/4/2010	3:06:19 PM	SiCl4 pre valve closed
8/4/2010	3:06:19 PM	SiCl4 post valve closed
8/4/2010	3:06:19 PM	Main Vac valve closed
8/4/2010	3:06:19 PM	Bypass valve closed
8/4/2010	3:06:19 PM	Bubbler valve closed
8/4/2010	3:06:19 PM	Helium MFC set to  0.000000
8/4/2010	3:06:19 PM	H2 MFC set to  0.000000
8/4/2010	3:06:19 PM	BCl3 MFC set to  0.000000
8/4/2010	3:06:19 PM	PHl3 MFC set to  0.000000
8/4/2010	3:06:19 PM	SiCl4 MFC set to  0.000000
8/4/2010	3:06:19 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	3:06:19 PM	Tube furnace set to 0
8/4/2010	3:06:20 PM	Run finished at 3:06 PM
8/4/2010	3:42:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/4/2010	3:42:41 PM	Recipe started at 3:42 PM
8/4/2010	3:42:42 PM	Helium valve closed
8/4/2010	3:42:42 PM	H2 valve closed
8/4/2010	3:42:42 PM	BCl3 valve closed
8/4/2010	3:42:42 PM	PH3 valve closed
8/4/2010	3:42:42 PM	SiCl4 pre valve closed
8/4/2010	3:42:42 PM	SiCl4 post valve closed
8/4/2010	3:42:42 PM	Main Vac valve closed
8/4/2010	3:42:42 PM	Bubbler valve closed
8/4/2010	3:42:42 PM	Bypass valve opened
8/4/2010	3:42:42 PM	Helium MFC set to  0.000000
8/4/2010	3:42:42 PM	H2 MFC set to  0.000000
8/4/2010	3:42:42 PM	BCl3 MFC set to  0.000000
8/4/2010	3:42:42 PM	PHl3 MFC set to  0.000000
8/4/2010	3:42:42 PM	SiCl4 MFC set to  0.000000
8/4/2010	3:42:42 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	3:42:42 PM	Tube furnace set to 0
8/4/2010	3:43:20 PM	Helium valve closed
8/4/2010	3:43:20 PM	H2 valve closed
8/4/2010	3:43:20 PM	BCl3 valve closed
8/4/2010	3:43:20 PM	PH3 valve closed
8/4/2010	3:43:20 PM	SiCl4 pre valve closed
8/4/2010	3:43:20 PM	SiCl4 post valve closed
8/4/2010	3:43:20 PM	Bubbler valve closed
8/4/2010	3:43:20 PM	Main Vac valve opened
8/4/2010	3:43:20 PM	Bypass valve opened
8/4/2010	3:43:20 PM	Helium MFC set to  0.000000
8/4/2010	3:43:20 PM	H2 MFC set to  0.000000
8/4/2010	3:43:20 PM	BCl3 MFC set to  0.000000
8/4/2010	3:43:20 PM	PHl3 MFC set to  0.000000
8/4/2010	3:43:20 PM	SiCl4 MFC set to  0.000000
8/4/2010	3:43:20 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	3:43:21 PM	Tube furnace set to 0
8/4/2010	3:43:21 PM	Run finished at 3:43 PM
8/4/2010	3:43:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/4/2010	4:25:09 PM	Helium MFC set to  100.000000
8/4/2010	4:25:10 PM	Helium valve opened
8/4/2010	4:25:12 PM	Tube furnace set to 100
8/4/2010	4:37:56 PM	Helium valve closed
8/4/2010	4:39:24 PM	Bypass valve closed
8/4/2010	4:39:25 PM	Main Vac valve closed
8/4/2010	4:39:28 PM	Main Vac valve opened
8/4/2010	4:39:29 PM	Bypass valve opened
8/4/2010	4:40:49 PM	Recipe started at 4:40 PM
8/4/2010	4:40:49 PM	Helium valve closed
8/4/2010	4:40:49 PM	BCl3 valve closed
8/4/2010	4:40:49 PM	PH3 valve closed
8/4/2010	4:40:49 PM	SiCl4 pre valve closed
8/4/2010	4:40:49 PM	SiCl4 post valve closed
8/4/2010	4:40:49 PM	Main Vac valve closed
8/4/2010	4:40:49 PM	Bypass valve closed
8/4/2010	4:40:49 PM	Bubbler valve closed
8/4/2010	4:40:49 PM	H2 valve opened
8/4/2010	4:40:49 PM	Helium MFC set to  0.000000
8/4/2010	4:40:49 PM	H2 MFC set to  500.000000
8/4/2010	4:40:49 PM	BCl3 MFC set to  0.000000
8/4/2010	4:40:49 PM	PHl3 MFC set to  0.000000
8/4/2010	4:40:49 PM	SiCl4 MFC set to  0.000000
8/4/2010	4:40:49 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	4:40:49 PM	Tube furnace set to 100
8/4/2010	4:42:09 PM	Helium valve closed
8/4/2010	4:42:09 PM	BCl3 valve closed
8/4/2010	4:42:09 PM	PH3 valve closed
8/4/2010	4:42:09 PM	SiCl4 pre valve closed
8/4/2010	4:42:09 PM	SiCl4 post valve closed
8/4/2010	4:42:09 PM	Main Vac valve closed
8/4/2010	4:42:09 PM	Bypass valve closed
8/4/2010	4:42:09 PM	H2 valve opened
8/4/2010	4:42:09 PM	Bubbler valve opened
8/4/2010	4:42:09 PM	Helium MFC set to  0.000000
8/4/2010	4:42:09 PM	H2 MFC set to  500.000000
8/4/2010	4:42:09 PM	BCl3 MFC set to  0.000000
8/4/2010	4:42:09 PM	PHl3 MFC set to  0.000000
8/4/2010	4:42:09 PM	SiCl4 MFC set to  0.000000
8/4/2010	4:42:09 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	4:42:09 PM	Tube furnace set to 1000
8/4/2010	5:02:09 PM	Helium valve closed
8/4/2010	5:02:09 PM	PH3 valve closed
8/4/2010	5:02:09 PM	Main Vac valve closed
8/4/2010	5:02:09 PM	Bypass valve closed
8/4/2010	5:02:09 PM	H2 valve opened
8/4/2010	5:02:09 PM	BCl3 valve opened
8/4/2010	5:02:09 PM	SiCl4 pre valve opened
8/4/2010	5:02:09 PM	SiCl4 post valve opened
8/4/2010	5:02:09 PM	Bubbler valve opened
8/4/2010	5:02:09 PM	Helium MFC set to  0.000000
8/4/2010	5:02:09 PM	H2 MFC set to  500.000000
8/4/2010	5:02:09 PM	BCl3 MFC set to  29.000000
8/4/2010	5:02:09 PM	PHl3 MFC set to  0.000000
8/4/2010	5:02:09 PM	SiCl4 MFC set to  50.000000
8/4/2010	5:02:09 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	5:02:09 PM	Tube furnace set to 1000
8/4/2010	5:12:09 PM	H2 valve closed
8/4/2010	5:12:09 PM	BCl3 valve closed
8/4/2010	5:12:09 PM	PH3 valve closed
8/4/2010	5:12:09 PM	SiCl4 pre valve closed
8/4/2010	5:12:09 PM	SiCl4 post valve closed
8/4/2010	5:12:09 PM	Main Vac valve closed
8/4/2010	5:12:09 PM	Bypass valve closed
8/4/2010	5:12:09 PM	Helium valve opened
8/4/2010	5:12:09 PM	Bubbler valve opened
8/4/2010	5:12:09 PM	Helium MFC set to  500.000000
8/4/2010	5:12:09 PM	H2 MFC set to  0.000000
8/4/2010	5:12:09 PM	BCl3 MFC set to  0.000000
8/4/2010	5:12:09 PM	PHl3 MFC set to  0.000000
8/4/2010	5:12:10 PM	SiCl4 MFC set to  0.000000
8/4/2010	5:12:10 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	5:12:10 PM	Tube furnace set to 0
8/4/2010	5:32:10 PM	Helium valve closed
8/4/2010	5:32:10 PM	H2 valve closed
8/4/2010	5:32:10 PM	BCl3 valve closed
8/4/2010	5:32:10 PM	PH3 valve closed
8/4/2010	5:32:10 PM	SiCl4 pre valve closed
8/4/2010	5:32:10 PM	SiCl4 post valve closed
8/4/2010	5:32:10 PM	Main Vac valve closed
8/4/2010	5:32:10 PM	Bypass valve closed
8/4/2010	5:32:10 PM	Bubbler valve closed
8/4/2010	5:32:10 PM	Helium MFC set to  0.000000
8/4/2010	5:32:10 PM	H2 MFC set to  0.000000
8/4/2010	5:32:10 PM	BCl3 MFC set to  0.000000
8/4/2010	5:32:10 PM	PHl3 MFC set to  0.000000
8/4/2010	5:32:10 PM	SiCl4 MFC set to  0.000000
8/4/2010	5:32:10 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	5:32:10 PM	Tube furnace set to 0
8/4/2010	5:32:10 PM	Run finished at 5:32 PM
8/4/2010	7:08:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/4/2010	7:08:47 PM	Recipe started at 7:08 PM
8/4/2010	7:08:47 PM	Helium valve closed
8/4/2010	7:08:47 PM	H2 valve closed
8/4/2010	7:08:47 PM	BCl3 valve closed
8/4/2010	7:08:47 PM	PH3 valve closed
8/4/2010	7:08:47 PM	SiCl4 pre valve closed
8/4/2010	7:08:47 PM	SiCl4 post valve closed
8/4/2010	7:08:47 PM	Main Vac valve closed
8/4/2010	7:08:47 PM	Bubbler valve closed
8/4/2010	7:08:47 PM	Bypass valve opened
8/4/2010	7:08:47 PM	Helium MFC set to  0.000000
8/4/2010	7:08:47 PM	H2 MFC set to  0.000000
8/4/2010	7:08:47 PM	BCl3 MFC set to  0.000000
8/4/2010	7:08:47 PM	PHl3 MFC set to  0.000000
8/4/2010	7:08:47 PM	SiCl4 MFC set to  0.000000
8/4/2010	7:08:47 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	7:08:47 PM	Tube furnace set to 0
8/4/2010	7:09:26 PM	Helium valve closed
8/4/2010	7:09:26 PM	H2 valve closed
8/4/2010	7:09:26 PM	BCl3 valve closed
8/4/2010	7:09:26 PM	PH3 valve closed
8/4/2010	7:09:26 PM	SiCl4 pre valve closed
8/4/2010	7:09:26 PM	SiCl4 post valve closed
8/4/2010	7:09:26 PM	Bubbler valve closed
8/4/2010	7:09:26 PM	Main Vac valve opened
8/4/2010	7:09:26 PM	Bypass valve opened
8/4/2010	7:09:26 PM	Helium MFC set to  0.000000
8/4/2010	7:09:26 PM	H2 MFC set to  0.000000
8/4/2010	7:09:26 PM	BCl3 MFC set to  0.000000
8/4/2010	7:09:26 PM	PHl3 MFC set to  0.000000
8/4/2010	7:09:26 PM	SiCl4 MFC set to  0.000000
8/4/2010	7:09:26 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	7:09:26 PM	Tube furnace set to 0
8/4/2010	7:09:26 PM	Run finished at 7:09 PM
8/4/2010	7:09:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/4/2010	9:02:40 PM	Helium valve opened
8/4/2010	9:02:44 PM	Helium MFC set to  100.000000
8/4/2010	9:19:55 PM	Helium valve closed
8/4/2010	9:19:58 PM	Helium MFC set to  0.000000
8/4/2010	11:12:23 PM	Recipe started at 11:12 PM
8/4/2010	11:12:23 PM	Helium valve closed
8/4/2010	11:12:23 PM	BCl3 valve closed
8/4/2010	11:12:23 PM	PH3 valve closed
8/4/2010	11:12:23 PM	SiCl4 pre valve closed
8/4/2010	11:12:23 PM	SiCl4 post valve closed
8/4/2010	11:12:23 PM	Main Vac valve closed
8/4/2010	11:12:23 PM	Bypass valve closed
8/4/2010	11:12:23 PM	Bubbler valve closed
8/4/2010	11:12:23 PM	H2 valve opened
8/4/2010	11:12:23 PM	Helium MFC set to  0.000000
8/4/2010	11:12:23 PM	H2 MFC set to  500.000000
8/4/2010	11:12:23 PM	BCl3 MFC set to  0.000000
8/4/2010	11:12:23 PM	PHl3 MFC set to  0.000000
8/4/2010	11:12:23 PM	SiCl4 MFC set to  0.000000
8/4/2010	11:12:23 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	11:12:23 PM	Tube furnace set to 1000
8/4/2010	11:13:44 PM	Helium valve closed
8/4/2010	11:13:44 PM	BCl3 valve closed
8/4/2010	11:13:44 PM	PH3 valve closed
8/4/2010	11:13:44 PM	SiCl4 pre valve closed
8/4/2010	11:13:44 PM	SiCl4 post valve closed
8/4/2010	11:13:44 PM	Main Vac valve closed
8/4/2010	11:13:44 PM	Bypass valve closed
8/4/2010	11:13:44 PM	H2 valve opened
8/4/2010	11:13:44 PM	Bubbler valve opened
8/4/2010	11:13:44 PM	Helium MFC set to  0.000000
8/4/2010	11:13:44 PM	H2 MFC set to  500.000000
8/4/2010	11:13:44 PM	BCl3 MFC set to  0.000000
8/4/2010	11:13:44 PM	PHl3 MFC set to  0.000000
8/4/2010	11:13:44 PM	SiCl4 MFC set to  0.000000
8/4/2010	11:13:44 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	11:13:44 PM	Tube furnace set to 1000
8/4/2010	11:33:44 PM	Helium valve closed
8/4/2010	11:33:44 PM	BCl3 valve closed
8/4/2010	11:33:44 PM	PH3 valve closed
8/4/2010	11:33:44 PM	Main Vac valve closed
8/4/2010	11:33:44 PM	Bypass valve closed
8/4/2010	11:33:44 PM	H2 valve opened
8/4/2010	11:33:44 PM	SiCl4 pre valve opened
8/4/2010	11:33:44 PM	SiCl4 post valve opened
8/4/2010	11:33:44 PM	Bubbler valve opened
8/4/2010	11:33:44 PM	Helium MFC set to  0.000000
8/4/2010	11:33:44 PM	H2 MFC set to  500.000000
8/4/2010	11:33:44 PM	BCl3 MFC set to  0.000000
8/4/2010	11:33:44 PM	PHl3 MFC set to  0.000000
8/4/2010	11:33:44 PM	SiCl4 MFC set to  50.000000
8/4/2010	11:33:44 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	11:33:44 PM	Tube furnace set to 1000
8/4/2010	11:48:44 PM	Helium valve closed
8/4/2010	11:48:44 PM	BCl3 valve closed
8/4/2010	11:48:44 PM	PH3 valve closed
8/4/2010	11:48:44 PM	SiCl4 pre valve closed
8/4/2010	11:48:44 PM	SiCl4 post valve closed
8/4/2010	11:48:44 PM	Main Vac valve closed
8/4/2010	11:48:44 PM	Bypass valve closed
8/4/2010	11:48:44 PM	H2 valve opened
8/4/2010	11:48:44 PM	Bubbler valve opened
8/4/2010	11:48:44 PM	Helium MFC set to  0.000000
8/4/2010	11:48:45 PM	H2 MFC set to  500.000000
8/4/2010	11:48:45 PM	BCl3 MFC set to  0.000000
8/4/2010	11:48:45 PM	PHl3 MFC set to  0.000000
8/4/2010	11:48:45 PM	SiCl4 MFC set to  0.000000
8/4/2010	11:48:45 PM	Bypass solenoid MFC set to  0.000000
8/4/2010	11:48:45 PM	Tube furnace set to 750
